Reactor Chamber

• Effective work volume: 20 in. (50 cm) H x 13 in. (33 cm) W x 16 in. (40 cm) D
  
• Front-loading door
  
• Primary plasma driven shelf design
  
• Patented power distribution
  
• RF- and UV-shielded, high-visibility view port
  
• All-aluminum construction
  
• Dielectric isolation of electrodes (prevents RF interaction with chamber walls)
  
• Front-to-back distributed gas flow
  
  Control System
• Microprocessor controller stores ten process recipes in nonvolatile memory, each capable of up to five separate steps
  
• Three digital displays for:
  1. PROCESS TIME
  2. PRESSURE
  3. VARIABLE (operator addressable for monitoring any other parameter, i.e. percent of gas flow, percent of RF power, time, and/or pressure)
  
• Key switch selects AUTOMATIC, MANUAL, and PROGRAMMING modes
  
• Status LED's indicate SYSTEM DELAY, MANUAL operation, DOOR OPEN, and RF AT SETPOINT
  
• Alarm LED's indicate HOLD (interrupted process), flow, temperature, and interlock failures
  
• Alphanumeric error codes displayed automatically on the variable readout to identify fault or out-of- tolerance conditions, and to help isolate the source of system or operator errors
  
• Three gas lines with individual mass flow controllers and stainless steel, solenoid-actuated isolation valves
  
• Single line for purge/slow vent, with needle and stainless steel solenoid
  
  RF Generator/Automatic
  Impedance Matching Network
• O-550 watt, 13.56 MHz, solid-state generator with 100% impedance mismatch protection
  
• Forward and reflected power meters
  
• Automatic impedance matching network
  - LCD alphanumeric display for diagnostics
  - Fast manual or automatic tuning
  
  Power Distribution Module
  
• Distributes power to all components (including vacuum pump, if purchased from Plasma Science), providing single--point power connection
  
• Separate circuit breakers with LED indicators for main power, controller, generator, and pump
  
• SYSTEM OFF, EMERGENCY OFF (EMO) button shuts off power to all components, including vacuum pump
  
• Keyed EMO prevents unauthorized use by locking out system power
  
  Optional Pump Package
• Turn key installation
  
• 180 cfm Roots vacuum pumping system, with integral connection to the process controller for:
  - Indication of ON/OFF status at the process controller
  - LOW OIL PRESSURE alarm with automatic shut-off
  - EMERGENCY OFF button puts process on HOLD and shuts off the pump
  - EMERGENCY OFF button at System Control shuts down system and pump
  
• Vane pump and Roots blower lubricated with inert oil
  
• External oil filtration system with pressure gauge
  
• 0il-mist separator
  
• Integral pump starter with control panel
  
  System Dimensions:
  80 1/2 in. (204 cm) H x 25 in. (64 cm) W x 35 in. (90 cm) D
  
  Installation Requirements:
  
• PS 0500 Plasma System
  
• Electrical Power: dedicated 208 VAC, 30, 30 Amp
  
• Compressed Air: ¼"" Swagelok™, fitting (regulated dry air with an inlet pressure greater than 60 psi to be supplied by the user)
  
• Slow vent/Purge: 1/4" Swagelok™ fittings (regulated gases to be supplied by user) Vacuum System
  
• Electrical Power: If purchased from Plasma Science, power source is pre-wired to system power distribution module
  
• Exhaust: Adequately rated, sealed exhaust line at 30 cfm connected to pump with a 1 1/2" ID KF-40 fitting
  
  Swagelok' is a registered trademark of the Crawford Fitting Company. Copyright HIMONT U.S.A., Inc. Plasma Science, 1991 Printed in U.S.A.

Reactor Chamber

• Unimpeded work volume: 12 in. H x 12 in. W x 12 in. D
  
• Primary plasma design
  
• 5 removable tempered glass shelves
  
• Front-loading door
  
• RF- and UV-shielded view port
  
• Dielectric isolation of electrodes (prevents RF interaction with chamber walls)
  
• Front-to-back laminar distributed gas flow
  
  Control System
• Microprocessor controller stores ten process recipes in nonvolatile memory, each capable of up to five separate steps
  
• Three digital displays for:
  1. PROCESS TIME
  2. PRESSURE
  3. VARIABLE (operator addressable for monitoring any other parameter, i.e. percent of gas flow, percent of forward power, temperature, time, and/or pressure)
  
• Key switch selects AUTOMATIC, MANUAL, and PROGRAMMING modes
  
• Status LED's indicate SYSTEM DELAY, MANUAL operation, DOOR OPEN, and RF AT SETPOINT
  
• Alarm LED's indicate HOLD (interrupted process), flow, temperature, and interlock failures
  
• Self-diagnostics displayed automatically on VARIABLE readout Automatic error checking of gas flows, RF power, and reflected power. An "out-of-tolerance" puts the process in HOLD, sounds an alarm, and displays an error code
  
• Single mass flow controlled process gas inlet as standard
  
• Second or third mass flow controlled gas inlets available as an option Stainless steel isolation valve
  
  RF Generator/Automatic
  Impedance Matching Network
• 0-200 watt, 13.56 MHz, solid-state generator
  
• 0-500 watt, 13.56 MHz, solid-state generator (optional)
  
• Automatic impedance matching network - LCD alphanumeric display for diagnostics - Fast manual or automatic tuning
  
  Power Distribution Module
  
• Distributes power to all components, (including vacuum pump, if purchased from Plasma Science), providing single--point power connection
  
• Circuit breaker with LED indicator for main power
  
• SYSTEM OFF, EMERGENCY OFF (EMO) button shuts off power to all components, including vacuum pump
  
• Keyed EMO prevents unauthorized use by locking out system power
  
  Standard 16 cfm Vacuum Pump Package
• Turn key installation (includes flexible plumbing and all fittings)
  
• Pump lubricated with inert oil
  Optional 27 cfm High Capacity Vacuum Pump Package
  
• Integral pump starter with control panel
  
• Pump lubricated with inert oil
  
• External filtration system with pressure gauge and oil mist separator (optional)
  
  System Dimensions:
  72 in. H x 25 in. W x 24 in. D
  
  Installation Requirements:
  
• PS 0150 Plasma System
  
• Electrical Power:
  - Dedicated 110 VAC, 10, 20 amp required for 16 cfm pump
  - Dedicated 208 VAC, 10 with neutral, 20 amp required for 27 cfm pump
  
• Compressed Air: ¼" Swagelok™ fitting (regulated dry air with an inlet pressure greater than 60 psi to be supplied by the user)
  Vacuum Pump
  
• Electrical Power: If purchased from Plasma Science, power source is pre-wired to system power distribution module
  
• Exhaust: Adequately rated, sealed exhaust line at 30 cfm connected to pump with a 1" tube fitting (11/2" for high capacity pump)
  
  Swagelok' is a registered trademark of the Crawford Fitting Company. Copyright HIMONT U.S.A., Inc. Plasma Science, 1991 Printed in U.S.A.

Reactor Chamber

• Un-impeded work volume: 16.75 in. H x 13.5 in. W x 17.5 in. D
  
• Primary plasma design
  
• Patented power distribution
  
• 9 removable tempered glass shelves
  
• Front-loading door
  
• RF- and UV-shielded view port
  
• Dielectric isolation of electrodes (prevents RF interaction with chamber walls)
  
• Front-to-back laminar distributed gas flow
  
  Control System
• Microprocessor controller stores ten process recipes in nonvolatile memory, each capable of up to five separate steps
  
• Three digital displays for:
  1. PROCESS TIME
  2. PRESSURE
  3. VARIABLE (operator addressable for monitoring any other parameter, i.e. percent of gas flow, percent of forward power, temperature, time, and/or pressure)
  
• Key switch selects AUTOMATIC, MANUAL, and PROGRAMMING modes
  
• Status LED's indicate SYSTEM DELAY, MANUAL operation, DOOR OPEN, and RF AT SETPOINT Alarm LED's indicate HOLD (interrupted process), flow, temperature, and interlock failures
  
• Self-diagnostics functions displayed automatically on VARIABLE readout
  
• Automatic error checking of gas flows, RF power, and reflected power. An "out-of-tolerance" puts the process in HOLD, sounds an alarm, and displays an error code
  
• Three gas lines with individual mass flow controllers and stainless steel isolation valves
  
  RF Generator/Automatic
  Impedance Matching Network
• 0-550 watt, 13.56 MHz, solid-state generator
  
• Automatic impedance matching network
  - LCD alphanumeric display for diagnostics
  - Fast manual or automatic tuning
  
  Power Distribution Module
  
• Distributes power to all components, providing single--point power connection
  
• Separate circuit breakers with LED indicators for main power, controller, generator, and pump
  
• SYSTEM OFF, EMERGENCY OFF (EMO) button shuts off power to all components, including vacuum pump
  
• Keyed EMO prevents unauthorized use by locking out system power
  
  Optional Pump Package
• Turn key
  
• 50 cfm two stage rotary vane pump (or alternative, high-capacity 180 cfm roots blower package) with integral connection to process controller for:
  - Indication of ON /OFF status at the process controller
  - LOW OIL PRESSURE alarm with automatic shut-off
  - EMERGENCY OFF button puts process on HOLD and shuts down system and pump
  - EMERGENCY OFF button at system control shuts down system and pump
  
• Pump lubricated with inert oil
  
• External filtration system with pressure gauge
  
• Oil-mist separator
  
• Integral pump starter with control panel
  
  System Dimensions:
  72 in. H x 25 in. W x 24 in. D
  
  Installation Requirements:
  
• PS 0350 Plasma System
  
• Electrical Power: 208 VAC, 30, 30 amp
  
• Compressed Air: '/4" Swagelok™ fitting (regulated dry air with an inlet pressure greater than 60 psi to be supplied by the user)
  Vacuum Pump
  
• Electrical Power: If purchased from Plasma Science, power source is pre-wired to system power distribution module
  
• Exhaust: Adequately-rated, sealed exhaust line at 30 cfm connected to pump with a 11/2" ID KF-40 fitting
  
  Swagelok' is a registered trademark of the Crawford Fitting Company. Copyright HIMONT U.S.A., Inc. Plasma Science, 1991 Printed in U.S.A.