PS 0350

Reactor Chamber

• Un-impeded work volume: 16.75 in. H x 13.5 in. W x 17.5 in. D
  
• Primary plasma design
  
• Patented power distribution
  
• 9 removable tempered glass shelves
  
• Front-loading door
  
• RF- and UV-shielded view port
  
• Dielectric isolation of electrodes (prevents RF interaction with chamber walls)
  
• Front-to-back laminar distributed gas flow
  
  Control System

• Microprocessor controller stores ten process recipes in nonvolatile memory, each capable of up to five separate steps
  
• Three digital displays for:
  1. PROCESS TIME
  2. PRESSURE
  3. VARIABLE (operator addressable for monitoring any other parameter, i.e. percent of gas flow, percent of forward power, temperature, time, and/or pressure)
  
• Key switch selects AUTOMATIC, MANUAL, and PROGRAMMING modes
  
• Status LED's indicate SYSTEM DELAY, MANUAL operation, DOOR OPEN, and RF AT SETPOINT Alarm LED's indicate HOLD (interrupted process), flow, temperature, and interlock failures
  
• Self-diagnostics functions displayed automatically on VARIABLE readout
  
• Automatic error checking of gas flows, RF power, and reflected power. An "out-of-tolerance" puts the process in HOLD, sounds an alarm, and displays an error code
  
• Three gas lines with individual mass flow controllers and stainless steel isolation valves
  
  RF Generator/Automatic
  Impedance Matching Network

• 0-550 watt, 13.56 MHz, solid-state generator
  
• Automatic impedance matching network
  - LCD alphanumeric display for diagnostics
  - Fast manual or automatic tuning
  
  Power Distribution Module
  
• Distributes power to all components, providing single--point power connection
  
• Separate circuit breakers with LED indicators for main power, controller, generator, and pump
  
• SYSTEM OFF, EMERGENCY OFF (EMO) button shuts off power to all components, including vacuum pump
  
• Keyed EMO prevents unauthorized use by locking out system power
  
  Optional Pump Package

• Turn key
  
• 50 cfm two stage rotary vane pump (or alternative, high-capacity 180 cfm roots blower package) with integral connection to process controller for:
  - Indication of ON /OFF status at the process controller
  - LOW OIL PRESSURE alarm with automatic shut-off
  - EMERGENCY OFF button puts process on HOLD and shuts down system and pump
  - EMERGENCY OFF button at system control shuts down system and pump
  
• Pump lubricated with inert oil
  
• External filtration system with pressure gauge
  
• Oil-mist separator
  
• Integral pump starter with control panel
  
  System Dimensions:
  72 in. H x 25 in. W x 24 in. D
  
  Installation Requirements:
  
• PS 0350 Plasma System
  
• Electrical Power: 208 VAC, 30, 30 amp
  
• Compressed Air: '/4" Swagelok™ fitting (regulated dry air with an inlet pressure greater than 60 psi to be supplied by the user)
  Vacuum Pump
  
• Electrical Power: If purchased from Plasma Science, power source is pre-wired to system power distribution module
  
• Exhaust: Adequately-rated, sealed exhaust line at 30 cfm connected to pump with a 11/2" ID KF-40 fitting
  
  Swagelok' is a registered trademark of the Crawford Fitting Company.