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PS 0150
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Product Specifications
Reactor Chamber
- Unimpeded work volume: 12 in. H x 12 in. W x 12 in. D
- Primary plasma design
- 5 removable tempered glass shelves
- Front-loading door
- RF- and UV-shielded view port
- Dielectric isolation of electrodes (prevents RF interaction
with chamber walls)
- Front-to-back laminar distributed gas flow
Control System
- Microprocessor controller stores ten process recipes in
nonvolatile memory, each capable of up to five separate steps
- Three digital displays for:
1. PROCESS TIME
2. PRESSURE
3. VARIABLE (operator addressable for monitoring any other parameter, i.e. percent of gas
flow, percent of forward power, temperature, time, and/or pressure)
- Key switch selects AUTOMATIC, MANUAL, and PROGRAMMING modes
- Status LED's indicate SYSTEM DELAY, MANUAL operation, DOOR
OPEN, and RF AT SETPOINT
- Alarm LED's indicate HOLD (interrupted process), flow,
temperature, and interlock failures
- Self-diagnostics displayed automatically on VARIABLE readout
Automatic error checking of gas flows, RF power, and reflected power. An
"out-of-tolerance" puts the process in HOLD, sounds an alarm, and displays an
error code
- Single mass flow controlled process gas inlet as standard
- Second or third mass flow controlled gas inlets available as
an option Stainless steel isolation valve
RF Generator/Automatic
Impedance Matching Network
- 0-200 watt, 13.56 MHz, solid-state generator
- 0-500 watt, 13.56 MHz, solid-state generator (optional)
- Automatic impedance matching network - LCD alphanumeric
display for diagnostics - Fast manual or automatic tuning
Power Distribution Module
- Distributes power to all components, (including vacuum pump,
if purchased from Plasma Science), providing single--point power connection
- Circuit breaker with LED indicator for main power
- SYSTEM OFF, EMERGENCY OFF (EMO) button shuts off power to all
components, including vacuum pump
- Keyed EMO prevents unauthorized use by locking out system
power
Standard 27 cfm Vacuum Pump Package
- Turn key installation (includes flexible plumbing and all
fittings)
- Pump lubricated with inert oil
- Integral pump starter with control panel
- External filtration system with pressure gauge and oil mist
separator
System Dimensions:
72 in. H x 25 in. W x 24 in. D
Installation Requirements:
- PS 0150 Plasma System
- Electrical Power:
- Dedicated 208 VAC, 10 with neutral, 20 amp required for 27 cfm pump
- Compressed Air: ¼" Swagelok™ fitting (regulated dry
air with an inlet pressure greater than 60 psi to be supplied by the user)
- Vacuum Pump
- Electrical Power: If purchased from Plasma Science, power
source is pre-wired to system power distribution module
- Exhaust: Adequately rated, sealed exhaust line at 30 cfm
connected to pump with a 1" tube fitting (11/2" for high capacity pump)
Swagelok' is a registered trademark of the Crawford Fitting Company.
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